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Electron Microscopy Glossary

This version:
https://purls.helmholtz-metadaten.de/emg/v2.0.0/
Previous version:
https://purls.helmholtz-metadaten.de/emg/v1.0.0/
Revision:
v2.0.0
Creators:
Abril Azocar Guzman
Volker Hofmann
Oonagh Brendike-Mannix
Contributors:
https://orcid.org/0000-0001-5870-4658
https://orcid.org/0000-0001-6534-4195
https://orcid.org/0000-0001-8480-4775
https://orcid.org/0000-0002-0070-4337
https://orcid.org/0000-0002-1008-4530
https://orcid.org/0000-0002-1278-4928
https://orcid.org/0000-0002-1418-0984
https://orcid.org/0000-0002-1507-9327
https://orcid.org/0000-0002-2818-5890
https://orcid.org/0000-0002-3054-8734
https://orcid.org/0000-0002-4499-0355
https://orcid.org/0000-0002-5149-603X
https://orcid.org/0000-0002-6004-2304
https://orcid.org/0000-0002-6368-2067
https://orcid.org/0000-0002-7086-1901
https://orcid.org/0000-0002-7117-5196
https://orcid.org/0000-0002-8218-3116
https://orcid.org/0000-0002-9555-7455
https://orcid.org/0000-0002-9700-4803
https://orcid.org/0000-0003-0000-4784
https://orcid.org/0000-0003-0575-2853
https://orcid.org/0000-0003-0930-082X
https://orcid.org/0000-0003-1965-7996
https://orcid.org/0000-0003-2285-9329
https://orcid.org/0000-0003-2534-0063
https://orcid.org/0000-0003-4745-9735
https://orcid.org/0009-0008-6410-7217
See also:
https://codebase.helmholtz.cloud/em_glossary/em_glossary_owl
Funder:
Helmholtz-Gemeinschaft Deutscher Forschungszentren
Nationale Forschungsdateninfrastruktur
Download serialization:
JSON-LD RDF/XML N-Triples TTL
License:
https://creativecommons.org/licenses/by/4.0/
Visualization:
Visualize with WebVowl
Cite as:
Azocar Guzman, A., Brendike-Mannix, O., Hofmann, V. (2024), Electron Microscopy Glossary, https://purls.helmholtz-metadaten.de/emg/
Provenance of this page
Glossary Specification

Electron Microscopy Glossary: Overview back to ToC

This ontology has the following classes and properties.

Classes

Electron Microscopy Glossary: Description back to ToC

The EM Glossary is a widespread community effort to harmonize terminology in the electron and ion microscopies. It is created in a not-for profit collaboration between academic and non-university research institutions including domain and metadata experts. It provides harmonized terminology for application level semantic artifacts to source from and align with.

Cross-reference for Electron Microscopy Glossary classes, object properties and data properties back to ToC

This section provides details for each class and property defined by Electron Microscopy Glossary.

Classes

Acceleration Voltagec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000004

The potential difference between anode and cathode.
has super-classes
thing c

Acquisition Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000055

time period during which data is acquired.
Example
camera exposure time in an EBSD measurement
dwell time in SEM and STEM imaging
time period during which image data (e.g. TEM) is acquired
time period during which spectroscopic data (e.g. EDS, EELS) is acquired
has super-classes
Time Period c

Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000005

A group of particles which move, on average, in a common direction.
Source
https://en.wikipedia.org/wiki/Charged_particle_beam
has super-classes
thing c
has sub-classes
Convergent Beam c, Electron Beam c, Ion Beam c, Monochromatic Beam c, Primary Beam c

Beam Currentc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000006

Electrical current which flows along the beam path.
has super-classes
thing c

Beam Moving Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000056

Moving time during which either the position or the tilt of the beam is altered.
has super-classes
Moving Time c

Beam Pathc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000007

Path which the beam flows along defined by the optical components of the instrument.
has super-classes
thing c

Bragg Diffractionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000064

Diffraction which follows Bragg's law.
Source
https://physicsopenlab.org/2018/01/18/bragg-diffraction/
has super-classes
Electron Diffraction c

Bragg's Lawc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000065

A condition which (1) is defined as twice the lattice spacing in a large crystal multiplied with the sine of the Bragg angle between the incident beam and a set of lattice planes, being a whole multiple of the radiation wavelength, and (2) if satisfied, may allow to relate the location of a scattering intensity maximum within a diffraction pattern to the corresponding lattice plane spacing.
has super-classes
thing c

Camera Lengthc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000008

Distance which is present between the specimen surface and the detector plane.
Source
https://www.doi.org/10.1007/978-3-030-00069-1
https://www.em.tf.fau.de/2020/04/02/low-energy-electron-diffraction-lend-published-in-ultramicroscopy/
https://www.globalsino.com/EM/page3245.html
https://www.jeol.co.jp/en/words/emterms/search_result.html?keyword=camera%20length
has super-classes
thing c

Coherent Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000009

A monochromatic beam which consists of waves that have a defined phase relationship.
has super-classes
Monochromatic Beam c

Convergence Anglec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000010

The angle which is given by the semi-opening angle of the cone in a convergent beam.
has super-classes
thing c

Convergent Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000011

A beam which is conically shaped such that its cross section is decreased to form a disc of least confusion.
has super-classes
Beam c
has sub-classes
Focused Beam c

Dead Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000054

Wait time which is due to a particle detector being physically incapable of registering detector events.
Source
https://www.iso.org/obp/ui/#iso:std:iso:15932:ed-1:v1:en
https://www.iso.org/obp/ui/#iso:std:iso:23833:ed-2:v1:en
has super-classes
Wait Time c

Detector Moving Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000057

Moving time during which either the position or the orientation of a detector is altered.
has super-classes
Moving Time c

Diffractionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000012

A physical phenomenon during which the direction and intensity of a propagating wave is changed due to interaction with matter having structure dimensions in the order of the wavelength.
Source
https://doi.org/10.1016/j.jqsrt.2018.02.002
https://doi.org/10.1351/goldbook.D01711
https://en.wikipedia.org/wiki/diffraction
has super-classes
thing c
has sub-classes
Electron Diffraction c

Diffraction Patternc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000013

A pattern which consists of spatial intensity modulation generated by diffraction.
has super-classes
thing c
has sub-classes
Electron Backscatter Diffraction Pattern c, Electron Diffraction Pattern c, Kikuchi Pattern c

Disk Of Least Confusionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000014

A cross section of a beam at which the beam has the smallest spatial extent.
has super-classes
thing c

Dwell Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000015

Time period during which the beam remains at one position.
Source
https://doi.org/10.1007/978-1-4939-6676-9
https://www.iso.org/obp/ui/#iso:std:iso:22493:ed-2:v1:en
has super-classes
Time Period c

Dynamic Focus Correctionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000016

Dynamic refocusing which keeps the electron probe focused on the surface of a tilted sample.
has super-classes
Dynamic Refocusing c

Dynamic Refocusingc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000017

A workflow to keep the specimen in focus by automatic means.
has super-classes
thing c
has sub-classes
Dynamic Focus Correction c

Elastic Scatteringc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000018

Scattering during which the particle that is scattered does not change its energy.
has super-classes
Scattering c

Electron Backscatter Diffractionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000019

Electron diffraction which primarily involves backscattered electrons from a solid sample.
Source
https://en.wikipedia.org/wiki/Electron_backscatter_diffraction
has super-classes
Electron Diffraction c

Electron Backscatter Diffraction Patternc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000020

A diffraction pattern which is generated by electron backscatter diffraction.
has super-classes
Diffraction Pattern c

Electron Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000021

A beam which consists of electrons.
has super-classes
Beam c

Electron Diffractionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000022

Diffraction which is based on a propagating electron wave.
Source
https://en.wikipedia.org/wiki/Diffraction
https://www.sciencedirect.com/topics/chemistry/electron-diffraction#:~:text=Electron%20diffraction%20is%20a%20technique,resulting%20in%20a%20diffraction%20pattern
has super-classes
Diffraction c
has sub-classes
Bragg Diffraction c, Electron Backscatter Diffraction c, Kikuchi Diffraction c

Electron Diffraction Patternc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000023

A diffraction pattern which is generated from electron diffraction.
has super-classes
Diffraction Pattern c

Electron Probec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000024

The part of the beam which interacts with the sample.
has super-classes
thing c

Emission Currentc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000025

Electrical current which is released from the source.
has super-classes
thing c

Extraction Voltagec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000026

Voltage which is utilised to create an electric field that draws particles from the source.
has super-classes
thing c

Filament Currentc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000027

Electrical current which flows through the source.
has super-classes
thing c

Flyback Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000028

Time period during which the beam moves from the final position of one scan line to the starting position of the subsequent scan line.
has super-classes
Time Period c

Focal Lengthc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000029

Distance which lies between the principal plane of the lens and the focal point along the optical axis.
has super-classes
thing c

Focal Planec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000030

Plane which is perpendicular to the optical axis and includes the focal point.
has super-classes
thing c

Focal Pointc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000031

Point which is defined by the intersection of the optical axis and the backwards extrapolated path of a ray that (1) is tending towards infinity, (2) was parallel to the optical axis in the incident beam, and (3) that was deflected by an electron lens.
Source
https://www.iso.org/obp/ui/#iso:std:iso:15932:ed-1:v1:en 2.1.4
https://www.iso.org/obp/ui/#iso:std:iso:22493:ed-2:v1:en 3.1.4
has super-classes
thing c

Focused Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000032

A convergent beam which originates from a coherent beam and whose cross section is decreased to the physically smallest possible disc of least confusion.
has super-classes
Convergent Beam c

Framec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000060

An array of data which represents a coherent and discrete set of time.
Example
A 2D EBSD map containing orientation data.
A 2D EDS map with compositional information.
A single Kikuchi pattern acquired by an EBSD camera.
Any 2D image acquired with an SEM or (S)TEM.
has super-classes
thing c

Frame Flyback Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000033

Time period during which the beam moves from the final position of one frame to the starting position of the subsequent frame.
has super-classes
Time Period c

Frame Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000034

Time period during which a frame is fully scanned.
Source
https://doi.org/10.1007/978-1-4939-6676-9
has super-classes
Time Period c

Incident Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000035

Primary beam before it interacts with the specimen.
has super-classes
Primary Beam c

Inelastic Scatteringc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000036

Scattering during which the particle that is scattered changes its energy.
has super-classes
Scattering c

Ion Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000037

A beam which consists of ions.
has super-classes
Beam c

Kikuchi Bandc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000063

Pattern of electron intensity which is (1) formed by electron diffraction, (2) appears as a geometrical feature in a Kikuchi pattern, (3) is an area different in intensity compared to background, and (4) is limited on each side by a Kikuchi line.
Source
https://en.wikipedia.org/wiki/Intensity_(physics)
https://en.wikipedia.org/wiki/Kikuchi_lines_(physics)
https://www.jeol.com/words/emterms/20121023.015559.php
has super-classes
thing c

Kikuchi Diffractionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000051

Electron diffraction during which, in a sequential order, electrons of the incident beam are inelastically scattered, form a point source inside the specimen, and leave the specimen through Bragg diffraction.
has super-classes
Electron Diffraction c
has sub-classes
Transmission Kikuchi Diffraction c

Kikuchi Linesc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000062

Patterns of electron intensity which are (1) formed by electron diffraction, (2) appear as a geometrical feature in a Kikuchi pattern as a pair of lines limiting Kikuchi bands.
Source
https://www.iso.org/obp/ui/en/#iso:std:iso:22493:ed-2:v1:en (section 6.5.1)
https://www.jeol.com/words/emterms/20121023.015559.php
has super-classes
thing c

Kikuchi Patternc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000052

A diffraction pattern which is generated by Kikuchi diffraction.
has super-classes
Diffraction Pattern c

Monochromatic Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000038

A beam which consists of particles of the same energy.
has super-classes
Beam c
has sub-classes
Coherent Beam c

Moving Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000058

Time period during which the position or orientation of either the beam or physical components are changed within a coordinate system of the microscope.
has super-classes
Time Period c
has sub-classes
Beam Moving Time c, Detector Moving Time c, Sample Moving Time c

Point Sourcec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000061

Spatial volume which has negligible extent, and from where particles or radiation originate and are emitted in all directions.
has super-classes
thing c

Pole Piecec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000039

A physical part of an electron or ion microscope which is part of the electromagnetic lens and is used to amplify and shape the magnetic field used to manipulate the beam.
Source
https://en.wikipedia.org/wiki/Pole_piece
https://www.jeol.co.jp/en/words/emterms/search_result.html?keyword=polepiece
has super-classes
thing c

Primary Beamc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000040

A beam which is unaltered in terms of its direction after interaction with the specimen.
Source
https://www.iso.org/obp/ui/#iso:std:iso:15932:ed-1:v1:en
https://www.iso.org/obp/ui/#iso:std:iso:23833:ed-2:v1:en
has super-classes
Beam c
has sub-classes
Incident Beam c

Probe Currentc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000041

Electrical current which arrives at the specimen.
has super-classes
thing c

Region Of Interestc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000042

Area which is (1) on the specimen and (2) to be sampled during an experiment.
has super-classes
thing c

Sample Moving Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000059

Moving time during which either the position or the orientation of the sample is altered.
has super-classes
Moving Time c

Scatteringc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000043

A physical phenomenon during which the trajectory of a particle is changed due to interaction with matter.
Source
https://doi.org/10.1016/j.jqsrt.2018.02.002
has super-classes
thing c
has sub-classes
Elastic Scattering c, Inelastic Scattering c, SEM Backscattering c, TEM Backscattering c, TEM Forwardscattering c

Scattering Anglec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000044

The angle which spans between the tangent of the incoming trajectory of an particle and the the tangent of the outgoing trajectory of the same particle, prior and past an instance of scattering.
has super-classes
thing c

SEM Backscatteringc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000001

Scattering during which electrons of an incident beam are scattered by a specimen, such that some of the scattered particles leave the specimen via the incident surface again.
Source
Ludwig Reimer, Scanning Electron Microscopy - Physics of Image Formation and Microanalysis (ISBN 978-3-642-08372-3) - pages 57ff
has super-classes
Scattering c

Sourcec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000045

A physical part of an electron or ion microscope from which the particles that form the beam are emitted.
Source
https://cmrf.research.uiowa.edu/scanning-electron-microscopy
Example
LaB_6 crystal
liquid metal Gallium
tungsten crystal
tungsten wire
has super-classes
thing c

Specimenc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000046

A physical entity which contains material intended to be investigated.
Source
https://biolincc.nhlbi.nih.gov/glossary/
https://doi.org/10.1351/pac199062061193
https://goldbook.iupac.org/terms/view/S05809
has super-classes
thing c

TEM Backscatteringc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000002

Scattering which results in scattered electrons with an absolute scattering angle larger than 90 degrees.
Source
Ludwig Reimer, Scanning Electron Microscopy - Physics of Image Formation and Microanalysis (ISBN 978-3-642-08372-3) - pages 57ff
has super-classes
Scattering c

TEM Forwardscatteringc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000003

Scattering which results in scattered electrons with an absolute scattering angle smaller than 90 degrees.
Source
Ludwig Reimer, Scanning Electron Microscopy - Physics of Image Formation and Microanalysis (ISBN 978-3-642-08372-3) - pages 57ff
has super-classes
Scattering c

Tilt Correctionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000047

An imaging setting which can be used during acquisition to correct perspective distortion when imaging a tilted surface or cross section.
has super-classes
thing c

Time Periodc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000048

An interval of time.
has super-classes
thing c
has sub-classes
Acquisition Time c, Dwell Time c, Flyback Time c, Frame Flyback Time c, Frame Time c, Moving Time c, Wait Time c

Transmission Kikuchi Diffractionc back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000053

Kikuchi diffraction during which electrons leave the electron-transparent sample at the side opposite to the incident beam.
has super-classes
Kikuchi Diffraction c

Wait Timec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000049

Time period in which no data are acquired.
has super-classes
Time Period c
has sub-classes
Dead Time c

Working Distancec back to ToC or Class ToC

IRI: https://purls.helmholtz-metadaten.de/emg/EMG_00000050

Distance which is determined along the optical axis within the column from (1) the lower end of the final optical element between the source and the specimen stage; to (2) the point where the beam is focused.
Source
https://www.globalsino.com/EM/page4586.html
has super-classes
thing c

Legend back to ToC

c: Classes
null

Acknowledgments back to ToC

The authors would like to thank Silvio Peroni for developing LODE, a Live OWL Documentation Environment, which is used for representing the Cross Referencing Section of this document and Daniel Garijo for developing Widoco, the program used to create the template used in this documentation.

This work was supported by (1) the Helmholtz Metadata Collaboration (HMC), an incubator-platform of the Helmholtz Association within the framework of the Information and Data Science strategic initiative, specifically HMC Hub Information at the Institute for Advanced Simulation - Materials Data Science and Informatics (IAS-9) at Forschungszentrum Jülich GmbH (FZJ), and HMC Hub Matter at the Abteilung Experimentsteuerung und Datenerfassung at the Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (HZB), and (2) the NFDI-MatWerk consortium funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under the National Research Data Infrastructure – NFDI 38/1 – project number 460247524.